Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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*HMDS priming | *HMDS priming | ||
*Spin coating | *Spin coating and soft baking | ||
* | *Priming, coating, and baking | ||
*Post-exposure baking | *Post-exposure baking | ||
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|style="background:LightGrey; color:black"|HMDS contact angle | |style="background:LightGrey; color:black"|HMDS contact angle | ||
|style="background:WhiteSmoke; color:black" align="center" | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
60 - 90° (on SiO2) | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameters | !style="background:silver; color:black" align="center" valign="center" rowspan="4"|Process parameters | ||
|style="background:LightGrey; color:black"|Spin speed | |style="background:LightGrey; color:black"|Spin speed | ||
|style="background:WhiteSmoke; color:black" align="center" | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
10 - 9990 rpm | 10 - 9990 rpm | ||
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|style="background:LightGrey; color:black"|Spin acceleration | |style="background:LightGrey; color:black"|Spin acceleration | ||
|style="background:WhiteSmoke; color:black" align="center" | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
1000 - 50000 rpm/s | |||
1000 - 50000 rpm/s | |||
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|style="background:LightGrey; color:black"|Hotplate temperature | |style="background:LightGrey; color:black"|Hotplate temperature | ||
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|style="background:LightGrey; color:black"|HMDS priming temperature | |style="background:LightGrey; color:black"|HMDS priming temperature | ||
|style="background:WhiteSmoke; color:black" align="center" | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
50°C | |||
50°C | |||
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!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | ||
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| style="background:LightGrey; color:black"|Allowed materials | | style="background:LightGrey; color:black"|Allowed materials | ||
|style="background:WhiteSmoke; color:black" | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
Silicon | |||
Glass | |||
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|style="background:LightGrey; color:black"|Batch | |style="background:LightGrey; color:black"|Batch | ||
|style="background:WhiteSmoke; color:black" align="center"| | |style="background:WhiteSmoke; color:black" align="center" colspan="2"| | ||
1 - 25 | 1 - 25 | ||
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