Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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== Recipes on the ASE == | == Recipes on the ASE == | ||
=== Shallolr === | === /* Shallolr */ === | ||
The shallolr recipe is designed to etch features (with sizes above 1 <math>\mu</math>m) in silicon down to a depth that ranges from a few microns to some 50 microns. If you need to etch deeper use Deepetch or more shallow, see Nanoetches. | The shallolr recipe is designed to etch features (with sizes above 1 <math>\mu</math>m) in silicon down to a depth that ranges from a few microns to some 50 microns. If you need to etch deeper use Deepetch or more shallow, see Nanoetches. | ||
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image:jmlshal070921 pos1 50mu_08.jpg|The profile of a 50 <math>\mu</math>m trench | image:jmlshal070921 pos1 50mu_08.jpg|The profile of a 50 <math>\mu</math>m trench | ||
</gallery> | </gallery> | ||
== [[Deepetch]] == | == [[Deepetch]] == | ||