Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
| Line 53: | Line 53: | ||
*Performance range | *Performance range | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan=" | !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Process parameter range | ||
|style="background:LightGrey; color:black"|Wavelength range | |style="background:LightGrey; color:black"|Wavelength range | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
| Line 70: | Line 70: | ||
*2mm (spot size on sample depends on the angle) | *2mm (spot size on sample depends on the angle) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*5mm (spot size on the sample depends on the angle | *5mm (spot size on the sample depends on the angle) | ||
|- | |- | ||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Accessories | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Accessories | ||