Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions

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 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range
-|style="background:LightGrey; color:black"|Parameter 1
+|style="background:LightGrey; color:black"|Wavelength range
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-*Range
+*210nm-1690nm
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-*Range
+*350nm-950nm
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-|style="background:LightGrey; color:black"|Parameter 2
+|style="background:LightGrey; color:black"|Incident angle range
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-*Range
+*45-90 degrees
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-*Range
+*One fixed angle - about 70 degrees
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 !style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates