Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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===A rough overview of the performance of the Ellipsometers=== | ===A rough overview of the performance of the Ellipsometers=== | ||
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | |||
|style="background:WhiteSmoke; color:black"|<b>Equipment 1</b> | |||
|style="background:WhiteSmoke; color:black"|<b>Equipment 2</b> | |||
|- | |||
!style="background:silver; color:black;" align="center" width="60"|Purpose | |||
|style="background:LightGrey; color:black"| | |||
|style="background:WhiteSmoke; color:black"| | |||
*Purpose 1 | |||
*Purpose 2 | |||
|style="background:WhiteSmoke; color:black"| | |||
*Purpose 1 | |||
*Purpose 2 | |||
*Purpose 3 | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | |||
|style="background:LightGrey; color:black"|Response 1 | |||
|style="background:WhiteSmoke; color:black"| | |||
*Performance range 1 | |||
*Performance range 2 | |||
|style="background:WhiteSmoke; color:black"| | |||
*Performance range 1 | |||
*Performance range 2 | |||
*Performance range 3 | |||
|- | |||
|style="background:LightGrey; color:black"|Response 2 | |||
|style="background:WhiteSmoke; color:black"| | |||
*Performance range | |||
|style="background:WhiteSmoke; color:black"| | |||
*Performance range | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | |||
|style="background:LightGrey; color:black"|Parameter 1 | |||
|style="background:WhiteSmoke; color:black"| | |||
*Range | |||
|style="background:WhiteSmoke; color:black"| | |||
*Range | |||
|- | |||
|style="background:LightGrey; color:black"|Parameter 2 | |||
|style="background:WhiteSmoke; color:black"| | |||
*Range | |||
|style="background:WhiteSmoke; color:black"| | |||
*Range | |||
|- | |||
!style="background:silver; color:black" align="center" valign="center" rowspan="3"|Substrates | |||
|style="background:LightGrey; color:black"|Batch size | |||
|style="background:WhiteSmoke; color:black"| | |||
*<nowiki>#</nowiki> small samples | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
|style="background:WhiteSmoke; color:black"| | |||
*<nowiki>#</nowiki> small samples | |||
*<nowiki>#</nowiki> 50 mm wafers | |||
*<nowiki>#</nowiki> 100 mm wafers | |||
*<nowiki>#</nowiki> 150 mm wafers | |||
|- | |||
| style="background:LightGrey; color:black"|Allowed materials | |||
|style="background:WhiteSmoke; color:black"| | |||
*Allowed material 1 | |||
*Allowed material 2 | |||
|style="background:WhiteSmoke; color:black"| | |||
*Allowed material 1 | |||
*Allowed material 2 | |||
*Allowed material 3 | |||
|- | |||
|} | |||
{| border="2" cellspacing="0" cellpadding="10" | {| border="2" cellspacing="0" cellpadding="10" | ||