Specific Process Knowledge/Characterization/Optical characterization: Difference between revisions
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Ellipsometry is an indirect measurement so a model has to be fit to the data in order to obtain the film thickness and optical constants. To learn more about ellipsometry you can take a look at the [http://www.jawoollam.com/tutorial_1.html tutorial] provided by the J. A. Woollam Co. | Ellipsometry is an indirect measurement so a model has to be fit to the data in order to obtain the film thickness and optical constants. To learn more about ellipsometry you can take a look at the [http://www.jawoollam.com/tutorial_1.html tutorial] provided by the J. A. Woollam Co. | ||
'''The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:''' | |||
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[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=18 LabManager] | |||
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===A rough overview of the performance of the Ellipsometers=== | ===A rough overview of the performance of the Ellipsometers=== | ||