Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions
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The process runs for 31 cycles (5:56 mins). The fact that it's Bosch process is clear from the scallops on the sidewalls - one should be able to count 31 of them. | The process runs for 31 cycles (5:56 mins). The fact that it's Bosch process is clear from the scallops on the sidewalls - one should be able to count 31 of them. | ||
The process is designed to reach 20 <math>\mu</math>m down in a 2 <math>\mu</math>m trench but as is clear from the image of the corresponding 50 <math>\mu</math>m trench, this one is etched deeper. | The process is designed to reach 20 <math>\mu</math>m down in a 2 <math>\mu</math>m trench but as is clear from the image of the corresponding 50 <math>\mu</math>m trench, this one is etched deeper. | ||
<gallery caption="Sample gallery" widths="300px" heights="300px" perrow="2"> | |||
[[Image:jmlshal070921 pos1 2mu_09.jpg|Standardization image of the profile of a 2 <math>\mu</math>m trench created by the shallolr recipe]] | |||
[[image:jmlshal070921 pos1 50mu_08.jpg|Standardization image of the profile of a 50 <math>\mu</math>m trench created by the shallolr recipe]] | |||
</gallery> | |||
[[image:jmlshal070921 pos1 2mu_09.jpg|370x370px|thumb|left|Standardization image of the profile of a 2 <math>\mu</math>m trench created by the shallolr recipe]] | [[image:jmlshal070921 pos1 2mu_09.jpg|370x370px|thumb|left|Standardization image of the profile of a 2 <math>\mu</math>m trench created by the shallolr recipe]] | ||