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| | | =Equipment Pages= |
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| {| style="color: black;" width="80%" | | {| style="color: black;" width="80%" |
| | colspan="2" | '''Equipment Pages''' | | | colspan="2" | |
| |- | | |- |
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| | style="width: 50%;"| | | | style="width: 30%;"| |
| | |
| ==[[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]==
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| | |
| ===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]===
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| *[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]]
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| *[[Specific Process Knowledge/Lithography/Pretreatment#BHF|BHF]]
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| *[[Specific Process Knowledge/Lithography/Pretreatment#250_C_oven_for_pretreatment|250C Oven for Pretreatment]]
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| | |
| ===[[Specific Process Knowledge/Lithography/Coaters|Coaters]]===
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| *[[Specific Process Knowledge/Lithography/Coaters#SSE Spinner|SSE Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Track 1 + 2|Track 1 + 2]]
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| *[[Specific Process Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Polymers)|Manual Spinner (Polymers)]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Laurell)|KS Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Polymers)|Manual Spinner (Polymers)]]
| |
| | |
| | style="width: 50%;"|
| |
| | |
| ==[[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]==
| |
|
| |
|
| ===[[Specific Process Knowledge/Lithography/Pretreatment|Pretreatment]]===
| |
| *[[Specific Process Knowledge/Lithography/Pretreatment#HMDS|HMDS]]
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| *[[Specific Process Knowledge/Lithography/Pretreatment#BHF|BHF]]
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| *[[Specific Process Knowledge/Lithography/Pretreatment#250_C_oven_for_pretreatment|250C Oven for Pretreatment]]
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| ===[[Specific Process Knowledge/Lithography/Coaters|Coaters]]===
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| *[[Specific Process Knowledge/Lithography/Coaters#SSE Spinner|SSE Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Track 1 + 2|Track 1 + 2]]
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| *[[Specific Process Knowledge/Lithography/Coaters#KS Spinner|KS Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Polymers)|Manual Spinner (Polymers)]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Laurell)|KS Spinner]]
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| *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Polymers)|Manual Spinner (Polymers)]]
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|
| |}
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| =Equipment Pages=
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| ==[[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]== | | ==[[Specific Process Knowledge/Lithography/UVLithography|UV Lithography]]== |
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| ===[[Specific Process Knowledge/Lithography/WaferCleaning|Wafer Cleaning]]=== | | ===[[Specific Process Knowledge/Lithography/WaferCleaning|Wafer Cleaning]]=== |
| | |
| | | style="width: 30%;"| |
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| ==[[Specific Process Knowledge/Lithography/DUVStepperLithography|DUV Stepper Lithography]]== | | ==[[Specific Process Knowledge/Lithography/DUVStepperLithography|DUV Stepper Lithography]]== |
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| ==[[Specific Process Knowledge/Lithography/3DLithography|3D Lithography]]== | | ==[[Specific Process Knowledge/Lithography/3DLithography|3D Lithography]]== |
| *[[Specific Process Knowledge/Lithography/3DLithography#2-Photon Polymerization|2-Photon Polymerization]] | | *[[Specific Process Knowledge/Lithography/3DLithography#2-Photon Polymerization|2-Photon Polymerization]] |
| | |
| | |} |
