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Specific Process Knowledge/Thermal Process/Oxidation/Breakdown voltage measurements/A2 furnace break-down voltage measurement results: Difference between revisions

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Created page with "==Breakdown voltage results for the A2 Gate Oxide furnace== ===Dry oxidation=== {| border="2" cellspacing="2" cellpadding="5" style="text-align: center;" |- |'''Date''' |'''Oxidation recipe''' |'''Oxide thickness''' |'''Absolute break-down voltage''' |'''Relative break-down voltage''' |- |'''February 2022''' |DRY1050 |150 nm |350x350px|thumb|left |image:2022-02-08_10-56-57_Wafer_A2_150nm_Rel.png|350x350px|thumb|le..."
 
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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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|'''Absolute break-down voltage'''
|'''Absolute break-down voltage'''
|'''Relative break-down voltage'''
|'''Relative break-down voltage'''
<i>= Absolute break-down voltage/oxide thickness<i>
|-
|-
|'''February 2022'''
|'''February 2022'''
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