Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Reactively sputtered SiO2 in Sputter-System Metal Oxide (PC1): Difference between revisions
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<gallery caption="Figure 2. Temparature changes without control during the RF substarte bias process." widths=" | <gallery caption="Figure 2. Temparature changes without control during the RF substarte bias process." widths="400px" heights="200px" perrow="1"> | ||
image:eves_RF_bias_and_temperature_PC1_2021.png|Temperature fluctuations. | image:eves_RF_bias_and_temperature_PC1_2021.png|Temperature fluctuations. | ||
</gallery> | </gallery> | ||