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Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride/ScN Reactive Sputtering in Cluster Lesker PC3: Difference between revisions

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==Scanning Electron microscopy==
==Scanning Electron Microscopy==


The images below present SEM images of the ScN layers from the top and tilted view.  
The images below present [[Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy |Scanning Electron Microscopy (SEM)]] images of the ScN layers from the top and tilted view.  


<gallery caption="Scanning Electron Microscopy." widths="480px" heights="400px" perrow="3">
<gallery caption="Scanning Electron Microscopy." widths="480px" heights="400px" perrow="3">
image:eves_SEM_ScN_3mTorr_1000s_200W_PC3_Src1_RF_ext_image1_20231013.png| <b><span style="color: red">ScN</span></b> layer deposited at 200 W RF power, 3mTorr, and 1000s. Gun Z-shift position is "Extended". Top view.
image:eves_SEM_ScN_3mTorr_1000s_200W_PC3_Src1_RF_ext_image1_20231013.png| <b><span style="color: red">ScN</span></b> layer deposited at 200 W RF power, 3mTorr, and 1000s. Gun Z-shift position is "Extended". Top view.
image:eves_SEM_ScN_3mTorr_1000s_200W_PC3_Src1_RF_ext_image2_20231013.png| <b><span style="color: red">ScN</span></b> layer deposited at 200 W RF power, 3mTorr, and 1000s. Gun Z-shift position is "Extended". Tilted view.  
image:eves_SEM_ScN_3mTorr_1000s_200W_PC3_Src1_RF_ext_image2_20231013.png| <b><span style="color: red">ScN</span></b> layer deposited at 200 W RF power, 3mTorr, and 1000s. Gun Z-shift position is "Extended". Tilted view.  
image:eves_SEM_ScN_3mTorr_1000s_200W_PC3_Src1_RF_ext_image3_20231013.png| <b><span style="color: red">ScN</span></b> layer deposited at 200 W RF power, 3mTorr, and 1000s. Gun Z-shift position is "Extended". Tilted view
image:eves_SEM_ScN_3mTorr_1000s_200W_PC3_Src1_RF_ext_image3_20231013.png| <b><span style="color: red">ScN</span></b> layer deposited at 200 W RF power, 3mTorr, and 1000s. Gun Z-shift position is "Extended". Tilted view
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