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Specific Process Knowledge/Thin film deposition/Deposition of Scandium Nitride/ScN Reactive Sputtering in Cluster Lesker PC3: Difference between revisions

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Eves (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,346 edits
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image:eves_XPS_ScN_PC3_Src1_RF_O_s1_fit_2031019.png|<b>O 1s</b> signal with fitted functions. The film has been etched for 160s wiht Ar<sup>+</sup> ions at low current and 1000eV energy before the scan.
image:eves_XPS_ScN_PC3_Src1_RF_O_s1_fit_2031019.png|<b>O 1s</b> signal with fitted functions. The film has been etched for 160s wiht Ar<sup>+</sup> ions at low current and 1000eV energy before the scan.
image:eves_XPS_ScN_PC3_Src1_RF_Sc2p_and_N1s_fit_2031019.png|<b>Sc 2p</b> and <b>N 1s </b> (in yellow) signals with fitted functions. Less useful for stoichiometry calculation, due to the profile complexity. N1s is dangerously close to Sc 2p, and need to be deconvolved. The film has been etched for 160s wiht Ar<sup>+</sup> ions at low current and 1000eV energy before the scan.
image:eves_XPS_ScN_PC3_Src1_RF_Sc2p_and_N1s_fit_2031019.png|<b>Sc 2p</b> and <b>N 1s </b> (in yellow) signals with fitted functions. Less useful for stoichiometry calculation, due to the profile complexity. N1s is dangerously close to Sc 2p, and need to be deconvolved. The film has been etched for 160s wiht Ar<sup>+</sup> ions at low current and 1000eV energy before the scan.
image:eves_XPS_ScN_PC3_Src1_RF_N_s1_fit_2031019_new.png|<b>N 1s </b> (in yellow) signal with fitted functions, where <b>Sc 2p</b> is also present (grey fitted area). Less useful for stoichiometry calculation, due to the profile complexity. N1s is dangerously close to Sc 2p, and need to be deconvolved. However, There are no other electronic states of nitrogen that can be used in XPS, so the deconvolution approach is the only option. The film has been etched for 160s wiht Ar<sup>+</sup> ions at low current and 1000eV energy before the scan.
image:eves_XPS_ScN_PC3_Src1_RF_N_s1_fit_2031019_new.png|<b>N 1s </b> (in yellow) signal with fitted functions, where <b>Sc 2p</b> is also present (grey fitted area). Difficult for stoichiometry calculation, due to the profile complexity. N1s is dangerously close to Sc 2p, and need to be deconvolved. However, there are no other electronic states of nitrogen that can be used in XPS, so the deconvolution approach is the only option. The film has been etched for 160s with Ar<sup>+</sup> ions at low current and 1000eV energy before the scan.
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