Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions
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==Recipes on PECVD2 for deposition of silicon nitride and silicon oxynitride == | ==Recipes on PECVD2 for deposition of silicon nitride and silicon oxynitride (PECVD2 has been DECOMMISSIONED!!) == | ||
===Recipes=== | ===Recipes=== | ||
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==Recipes on PECVD1 for deposition of silicon nitride and silicon oxynitride. <span style="color:Red">Expired!</span>:PECVD1 has been decommissioned== | ==Recipes on PECVD1 for deposition of silicon nitride and silicon oxynitride. <span style="color:Red">Expired!</span>:PECVD1 has been decommissioned== | ||