Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide/Deposition of Silicon Oxide using Lesker sputter tool: Difference between revisions
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Below you will find the deposition parameters and results of a study on the surface roughness and oxide insulation quality of the sputtered SiO<sub>2</sub>. | Below you will find the deposition parameters and results of a study on the surface roughness and oxide insulation quality of the sputtered SiO<sub>2</sub>. | ||
==Surface roughness optimization== | ===Surface roughness optimization=== | ||
''By <b>Bjarke Thomas Dalslet @Nanotech.dtu.dk</b>'' | ''By <b>Bjarke Thomas Dalslet @Nanotech.dtu.dk</b>'' | ||