Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions
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==Batch process== | ==Batch process== | ||
The advance system with the cassette loader and robot arm, allow running a batch process ("Master Cassette" recipes). These processes are not among the standard recipes but can be developed by DTU Nanolab upon the request. | |||