Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions

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 !colspan="1" border="none" style="background:silver; color:black;" align="center"|Power Supply ID
-|style="background:WhiteSmoke; color:black"|<b>Type</b>
+|style="background:silver; color:black"|<b>Type</b>
-|style="background:WhiteSmoke; color:black"|<b>Maximum output power (W)</b>
+|style="background:silver; color:black"|<b>Maximum output power (W)</b>
-|style="background:WhiteSmoke; color:black"|<b>Maximum output voltage (V)</b>
+|style="background:silver; color:black"|<b>Maximum output voltage (V)</b>
-|style="background:WhiteSmoke; color:black"|<b>Maximum output current (A)</b>
+|style="background:silver; color:black"|<b>Maximum output current (A)</b>
-|style="background:WhiteSmoke; color:black"|<b>Comments</b>
+|style="background:silver; color:black"|<b>Comments</b>
 |-
-!style="background:silver; color:black;" align="center" width="60"|PC1 Power Supply 1
+!style="background:silver; color:black;" align="center" |PC1 Power Supply 1
-|style="background:WhiteSmoke; color:black"|RF
+|style="background:WhiteSmoke; color:black" align="center"|RF
-|style="background:WhiteSmoke; color:black"|300
+|style="background:WhiteSmoke; color:black" align="center"|300
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black"|
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 3
+!style="background:silver; color:black" align="center" valign="center"|PC1 Power Supply 3
-|style="background:WhiteSmoke; color:black"|DC
+|style="background:WhiteSmoke; color:black" align="center"|DC
-|style="background:WhiteSmoke; color:black"|500
+|style="background:WhiteSmoke; color:black" align="center"|500
-|style="background:WhiteSmoke; color:black"|1000
+|style="background:WhiteSmoke; color:black" align="center"|1000
-|style="background:WhiteSmoke; color:black"|4
+|style="background:WhiteSmoke; color:black" align="center"|4
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black"|
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 4
+!style="background:silver; color:black" align="center" valign="center" |PC1 Power Supply 4
-|style="background:WhiteSmoke; color:black"|DC
+|style="background:WhiteSmoke; color:black" align="center"|DC
-|style="background:WhiteSmoke; color:black"|500
+|style="background:WhiteSmoke; color:black" align="center"|500
-|style="background:WhiteSmoke; color:black"|1000
+|style="background:WhiteSmoke; color:black" align="center"|1000
-|style="background:WhiteSmoke; color:black"|4
+|style="background:WhiteSmoke; color:black" align="center"|4
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black"|
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 5
+!style="background:silver; color:black" align="center" valign="center" |PC1 Power Supply 5
-|style="background:WhiteSmoke; color:black"|Pulse DC
+|style="background:WhiteSmoke; color:black" align="center"|Pulse DC
-|style="background:WhiteSmoke; color:black"|2000
+|style="background:WhiteSmoke; color:black" align="center"|2000
-|style="background:WhiteSmoke; color:black"|800
+|style="background:WhiteSmoke; color:black" align="center"|800
-|style="background:WhiteSmoke; color:black"|5
+|style="background:WhiteSmoke; color:black" align="center"|5
 |style="background:WhiteSmoke; color:black"|
-Max frequency: 100kHz
+Max frequency: 100kHz <br>
 Max reverse time: 10µs
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC1 Power Supply 7
+!style="background:silver; color:black" align="center" valign="center" |PC1 Power Supply 7
-|style="background:WhiteSmoke; color:black"|RF (Substrate)
+|style="background:WhiteSmoke; color:black" align="center"|RF (Substrate)
-|style="background:WhiteSmoke; color:black"|100
+|style="background:WhiteSmoke; color:black" align="center"|100
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black"|
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 1
+!style="background:silver; color:black" align="center" valign="center" |PC3 Power Supply 1
-|style="background:WhiteSmoke; color:black"|RF
+|style="background:WhiteSmoke; color:black" align="center"|RF
-|style="background:WhiteSmoke; color:black"|300
+|style="background:WhiteSmoke; color:black" align="center"|300
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black"|
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 2
+!style="background:silver; color:black" align="center" valign="center"|PC3 Power Supply 2
-|style="background:WhiteSmoke; color:black"|Pulse DC
+|style="background:WhiteSmoke; color:black" align="center"|Pulse DC
-|style="background:WhiteSmoke; color:black"|2000
+|style="background:WhiteSmoke; color:black" align="center"|2000
-|style="background:WhiteSmoke; color:black"|800
+|style="background:WhiteSmoke; color:black" align="center"|800
-|style="background:WhiteSmoke; color:black"|5
+|style="background:WhiteSmoke; color:black" align="center"|5
 |style="background:WhiteSmoke; color:black"|
-Max frequency: 100kHz
+Max frequency: 100kHz <br>
 Max reverse time: 10µs
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 3
+!style="background:silver; color:black" align="center" valign="center" |PC3 Power Supply 3
-|style="background:WhiteSmoke; color:black"|DC to HiPIMS
+|style="background:WhiteSmoke; color:black" align="center"|DC to HiPIMS
-|style="background:WhiteSmoke; color:black"|1500
+|style="background:WhiteSmoke; color:black" align="center"|1500
-|style="background:WhiteSmoke; color:black"|1000
+|style="background:WhiteSmoke; color:black" align="center"|1000
-|style="background:WhiteSmoke; color:black"|4
+|style="background:WhiteSmoke; color:black" align="center"|4
 |style="background:WhiteSmoke; color:black"|
-HiPIMS Unit
+HiPIMS Unit <br>
-Time Avg. Power: 1.5kW
+Time Avg. Power: 1.5kW <br>
-Output Peak Voltage:
+Output Peak Voltage: <br>
--1000V nominal,
+-1000V nominal, <br>
--1250V tolerant
+-1250V tolerant <br>
-Output Peak Current:
+Output Peak Current: <br>
-A nominal,
+A nominal, <br>
 A toleran
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 5
+!style="background:silver; color:black" align="center" valign="center" |PC3 Power Supply 5
-|style="background:WhiteSmoke; color:black"|DC
+|style="background:WhiteSmoke; color:black" align="center"|DC
-|style="background:WhiteSmoke; color:black"|500
+|style="background:WhiteSmoke; color:black" align="center"|500
-|style="background:WhiteSmoke; color:black"|1000
+|style="background:WhiteSmoke; color:black" align="center"|1000
-|style="background:WhiteSmoke; color:black"|4
+|style="background:WhiteSmoke; color:black" align="center"|4
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black"|
 |-
-!style="background:silver; color:black" align="center" valign="center" rowspan="2"|PC3 Power Supply 6
+!style="background:silver; color:black" align="center" valign="center" |PC3 Power Supply 6
-|style="background:WhiteSmoke; color:black"|RF (substrate)
+|style="background:WhiteSmoke; color:black" align="center"|RF (substrate)
-|style="background:WhiteSmoke; color:black"|100
+|style="background:WhiteSmoke; color:black" align="center"|100
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black" align="center"|
-|style="background:WhiteSmoke; color:black"|--
+|style="background:WhiteSmoke; color:black"|
 |-