Specific Process Knowledge/Thin film deposition/Cluster-based multi-chamber high vacuum sputtering deposition system: Difference between revisions
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[[Category: Thin Film Deposition|Sputter deposition Lesker]] | [[Category: Thin Film Deposition|Sputter deposition Lesker]] | ||
[[image:Kaempe_Lesker_image_front_page1.jpg|right| | [[image:Kaempe_Lesker_image_front_page1.jpg|450x450px|right|thumb|Cluster-based multi-chamber high vacuum sputtering deposition system. View from service room Ax-1.]] | ||
== LESKER Sputter Tool== | == LESKER Sputter Tool== | ||