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Specific Process Knowledge/Thin film deposition/Deposition of Silicon Nitride/Deposition of Silicon Nitride using PECVD: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
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! QC Recipe:
! QC Recipe:
! QCNITRIDE
! QCNITRIDE=HFSIN
|-  
|-  
| SiH<sub>4</sub> flow
| SiH<sub>4</sub> flow
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