LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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image:SiMicroPillars.png| High aspect ratio silicon micropillars fabricated with DREM process. | image:SiMicroPillars.png| High aspect ratio silicon micropillars fabricated with DREM process. | ||
image:ZIF8.png| ZIF-8 crystals for tunable structural colors. | image:ZIF8.png| ZIF-8 crystals for tunable structural colors. | ||
image:FConPegasus.png| Using OES to monitor the fluorocarbon film deposition with Pegasus 1. | |||
</gallery> | </gallery> | ||