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LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions

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DCH-Employees-701, NLAB-LabmanagerAllUsers
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Bincha (talk | contribs)
DCH-Employees-701, NLAB-LabmanagerAllUsers
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<gallery caption="SEM images of fabricated microstructures and nanostructures" widths="380px" heights="300px" perrow="3">
<gallery caption="SEM images of fabricated microstructures and nanostructures" widths="380px" heights="300px" perrow="3">
image:3D_PhC.png| 3D silicon photonic crystal membranes.  
image:3D_PhC.png| 3D silicon photonic crystal membranes.  
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:Scallops.png| Comparison of scallops by traditional Bosch process and modified DREM process.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
image:3D_PhC.png| 3D silicon photonic crystal membranes.
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