LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions
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==Publications in peer-reviewed journal papers== | ==Publications in peer-reviewed journal papers== | ||
The results achieved during the ph.d. project have been published on some peer-reviewed journals, which are listed as below: | |||
===Publications as first author === | ===Publications as first author === | ||
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==Conference contributions== | ==Conference contributions== | ||
The results achieved during the ph.d. project have been presented in the following conferences. | |||
*;'''RIE-lag “Correction” and Infinite Etching Selectivity with Conventional Photoresist in a Bosch Process''' | *;'''RIE-lag “Correction” and Infinite Etching Selectivity with Conventional Photoresist in a Bosch Process''' | ||
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==Student projects== | ==Student projects== | ||
During the ph.d. projects, following student projects have been performed for bachelor students. | |||
*;'''High Resolution Pattern Definition with Electron Beam Lithography''' | *;'''High Resolution Pattern Definition with Electron Beam Lithography''' | ||