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LabAdviser/Technology Research/Technology Development of 3D Silicon Plasma Etching process for Novel Devices and Applications: Difference between revisions

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<u>Chang, B.</u>, Leussink, P., Jensen, F., Hübner, J. and Jansen, H.,
<u>Chang, B.</u>, Leussink, P., Jensen, F., Hübner, J. and Jansen, H.,


Microelectronic Engineering, 191, pp.77-83 (2018)
Microelectronic Engineering, 191, pp.77-83 (2018) [https://doi.org/10.1016/j.mee.2018.01.034 DOI]


'''DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro-and nanostructures by a modified Bosch etch process'''
'''DREM2: a facile fabrication strategy for freestanding three dimensional silicon micro-and nanostructures by a modified Bosch etch process'''
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<u>Chang, B.</u>, Jensen, F., Hübner, J. and Jansen, H
<u>Chang, B.</u>, Jensen, F., Hübner, J. and Jansen, H


Journal of Micromechanics and Microengineering, 28(10), p.105012 (2018)
Journal of Micromechanics and Microengineering, 28(10), p.105012 (2018) [https://doi.org/10.1088/1361-6439/aad0c4 DOI]


'''Confined Growth of ZIF‐8 Nanocrystals with Tunable Structural Colors'''
'''Confined Growth of ZIF‐8 Nanocrystals with Tunable Structural Colors'''
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<u>Chang, B.</u>, Yang, Y., Jansen, H., Ding, F., Mølhave, K. and Sun, H.  
<u>Chang, B.</u>, Yang, Y., Jansen, H., Ding, F., Mølhave, K. and Sun, H.  


Advanced Materials Interfaces, 5(9), p.1701270 (2018)
Advanced Materials Interfaces, 5(9), p.1701270 (2018) [https://doi.org/10.1002/admi.201701270 DOI]


'''Highly Ordered 3D Silicon Micro‐Mesh Structures Integrated with Nanowire Arrays: A Multifunctional Platform for Photodegradation, Photocurrent Generation, and Materials Conversion'''
'''Highly Ordered 3D Silicon Micro‐Mesh Structures Integrated with Nanowire Arrays: A Multifunctional Platform for Photodegradation, Photocurrent Generation, and Materials Conversion'''
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<u>Chang, B.</u>, Tang, Y., Liang, M., Jansen, H., Jensen, F., Wang, B., Mølhave, K., Hübner, J. and Sun, H.
<u>Chang, B.</u>, Tang, Y., Liang, M., Jansen, H., Jensen, F., Wang, B., Mølhave, K., Hübner, J. and Sun, H.


ChemNanoMat (2018)
ChemNanoMat (2018) [https://doi.org/10.1002/cnma.201800371 DOI]


'''Large Area Three- Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects'''
'''Large Area Three- Dimensional Photonic Crystal Membranes: Single-Run Fabrication and Applications with Embedded Planar Defects'''
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<u>Chang, B.</u>,  Zhou, C., Tarekegne, A., Yang, Y., Zhao, D., Jensen, F., Hübner, J., Jansen, H.
<u>Chang, B.</u>,  Zhou, C., Tarekegne, A., Yang, Y., Zhao, D., Jensen, F., Hübner, J., Jansen, H.


Advanced Optical Materials (2018)
Advanced Optical Materials (2018) [https://doi.org/10.1002/adom.201801176 DOI]