LabAdviser/Technology Research/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes/SEM-LEO Customizations for Organic Ice Resists: Difference between revisions
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==Loadlock== | ==Loadlock== | ||
[[File:Exchange_OIR.png|200px|thumb|right|Rendering of the loadlock assembly installed on the LEO.]] | |||
On the left-hand side of the chamber, the load-lock system was implemented to allow exchange operations without condensation of ambient humidity onto cold parts and samples. Since it avoids main chamber ventilation, such a setup maintains stable high vacuum levels inside the SEM, so it can be also useful for regular room-temperature EBL operation, providing a faster and cleaner exchange. | On the left-hand side of the chamber, the load-lock system was implemented to allow exchange operations without condensation of ambient humidity onto cold parts and samples. Since it avoids main chamber ventilation, such a setup maintains stable high vacuum levels inside the SEM, so it can be also useful for regular room-temperature EBL operation, providing a faster and cleaner exchange. | ||
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==Cryogenics== | ==Cryogenics== | ||
[[File:Cryo_OIR.png|200px|thumb|right|Rendering of the custom flange and stage for cryogenic operation.]] | |||
The cryogenic elements represent the main additions to the inner SEM chamber. A large cold finger and a cryostage are connected together by a copper braid, and mounted onto the same vacuum flange on the right side of the SEM. The cold finger is mechanically attached to a copper rod feed-through. The external ambient end of the rod stays suspended into a vacuum flask filled with liquid nitrogen on the SEM table. Two hours after immersing the copper rod in liquid nitrogen, the cold finger and cryostage cool to 110 K and 130 K, respectively. The lowest possible temperature of the cryostage is 120 K. | The cryogenic elements represent the main additions to the inner SEM chamber. A large cold finger and a cryostage are connected together by a copper braid, and mounted onto the same vacuum flange on the right side of the SEM. The cold finger is mechanically attached to a copper rod feed-through. The external ambient end of the rod stays suspended into a vacuum flask filled with liquid nitrogen on the SEM table. Two hours after immersing the copper rod in liquid nitrogen, the cold finger and cryostage cool to 110 K and 130 K, respectively. The lowest possible temperature of the cryostage is 120 K. | ||
==Practical Stuff== | ==Practical Stuff== | ||
[[image:GIS_OIR.png|250px|thumb|Vacuum schematics of the OIR assembly in place.]] | [[image:GIS_OIR.png|250px|thumb|left|Vacuum schematics of the OIR assembly in place.]] | ||
The overall vacuum schematics once all systems are in place is displayed in the image. An external rack houses the temperature, gate valve control and interlock, and the load-lock pump controller. The pumping controller is interfaced with the interlock inside the rack and with the load-lock turbo and roughing pumps which are located under the cleanroom floor, and can control both of them individually. | The overall vacuum schematics once all systems are in place is displayed in the image. An external rack houses the temperature, gate valve control and interlock, and the load-lock pump controller. The pumping controller is interfaced with the interlock inside the rack and with the load-lock turbo and roughing pumps which are located under the cleanroom floor, and can control both of them individually. | ||