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LabAdviser/Technology Research/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes: Difference between revisions

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*: [https://doi.org/10.1021/acs.nanolett.7b04190 Link to Article]
*: [https://doi.org/10.1021/acs.nanolett.7b04190 Link to Article]
*: <u>W. Tiddi</u>, A. Elsukova, H. T. Le, P. Liu, M. Beleggia, and A. Han<br> ''Nano Letters'', vol. 17, pp. 7886-7891, 2017.
*: <u>W. Tiddi</u>, A. Elsukova, H. T. Le, P. Liu, M. Beleggia, and A. Han<br> ''Nano Letters'', vol. 17, pp. 7886-7891, 2017.
** '''Overview:''' [[Specific Process Knowledge/Lithography/EBeamLithography/RaithElphy/Electron-Beam Lithography on Organic Ice Resists|Electron-Beam Lithography on Organic Ice Resists]]
** '''Overview:''' [[/Electron-Beam Lithography on Organic Ice Resists|Electron-Beam Lithography on Organic Ice Resists]]




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*: [https://doi.org/10.1016/j.mee.2018.01.021 Link to Article]
*: [https://doi.org/10.1016/j.mee.2018.01.021 Link to Article]
*: <u>W. Tiddi</u>, A. Elsukova, M. Beleggia, and A. Han<br> ''Microelectronic Engineering'', vol. 192, pp. 38-43, 2018.
*: <u>W. Tiddi</u>, A. Elsukova, M. Beleggia, and A. Han<br> ''Microelectronic Engineering'', vol. 192, pp. 38-43, 2018.
** '''Overview:''' [[Specific Process Knowledge/Lithography/EBeamLithography/RaithElphy/SEM-LEO Customizations for Organic Ice Resists|SEM-LEO Customizations for Organic Ice Resists]]
** '''Overview:''' [[/SEM-LEO Customizations for Organic Ice Resists|SEM-LEO Customizations for Organic Ice Resists]]




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