LabAdviser/Technology Research/Organic Ice Resists for Electron-Beam Lithography - Instrumentation and Processes: Difference between revisions
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*; Organic Ice Resists | *; Organic Ice Resists | ||
*: [[File:Graphical Abstract.gif|300px]] | |||
*: [https://doi.org/10.1021/acs.nanolett.7b04190 Link to Article] | |||
*: <u>W. Tiddi</u>, A. Elsukova, H. T. Le, P. Liu, M. Beleggia, and A. Han<br> ''Nano Letters'', vol. 17, pp. 7886-7891, 2017. | *: <u>W. Tiddi</u>, A. Elsukova, H. T. Le, P. Liu, M. Beleggia, and A. Han<br> ''Nano Letters'', vol. 17, pp. 7886-7891, 2017. | ||
*; Organic ice resists for 3D electron-beam processing - Instrumentation and operation | *; Organic ice resists for 3D electron-beam processing - Instrumentation and operation | ||
*: [[File:Graphical Abstract.jpg|300px]] | |||
*: [https://doi.org/10.1016/j.mee.2018.01.021 Link to Article] | |||
*: <u>W. Tiddi</u>, A. Elsukova, M. Beleggia, and A. Han<br> ''Microelectronic Engineering'', vol. 192, pp. 38-43, 2018. | *: <u>W. Tiddi</u>, A. Elsukova, M. Beleggia, and A. Han<br> ''Microelectronic Engineering'', vol. 192, pp. 38-43, 2018. | ||
*; Inductively coupled plasma nanoetching of atomic layer deposition alumina | *; Inductively coupled plasma nanoetching of atomic layer deposition alumina | ||
*: [[File:Graphical Abstract2.jpg|300px]] | |||
*: [https://doi.org/10.1016/j.mee.2018.02.023 Link to Article] | |||
*: A. Han, B. Chang, M. Todeschini, H. T. Le, <u>W. Tiddi</u> and M. Keil<br> ''Microelectronic Engineering'', vol. 193, pp. 28-33, 2018. | *: A. Han, B. Chang, M. Todeschini, H. T. Le, <u>W. Tiddi</u> and M. Keil<br> ''Microelectronic Engineering'', vol. 193, pp. 28-33, 2018. | ||
===Published Patents=== | ===Published Patents=== | ||
*; A METHOD FOR CREATING STRUCTURES OR DEVICES USING AN ORGANIC ICE RESIST. | *; A METHOD FOR CREATING STRUCTURES OR DEVICES USING AN ORGANIC ICE RESIST. | ||
*:[http://patentscope.wipo.int/search/en/WO2017191079 Link to Patent Database] | |||
*: A. Han (Inventor), <u>W. Tiddi</u> (Inventor), M. Beleggia (Inventor)<br> IPC No.: B29C 67/ 00 A I. Patent No.: WO2017191079. Nov 09, 2017. | *: A. Han (Inventor), <u>W. Tiddi</u> (Inventor), M. Beleggia (Inventor)<br> IPC No.: B29C 67/ 00 A I. Patent No.: WO2017191079. Nov 09, 2017. | ||