LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition/AZO gratings: Difference between revisions
Created page with "====Procces flow description==== All samples were prepared and characterized in a class 100 cleanroom. Si (100) wafers of 150 mm were used as a substrate. The main steps in t..." |
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image:AZO_trench_fab.jpg| Scheme of fabrication flow. High aspect ratio Al<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> nanogratings. | image:AZO_trench_fab.jpg| Scheme of fabrication flow. High aspect ratio Al<sub>2</sub>O<sub>3</sub> and TiO<sub>2</sub> nanogratings. | ||
</gallery> | </gallery> | ||