LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions
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(2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016) [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK] | (2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016) [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK] | ||
*[[/TIO_ALU_Gratings_Procces_flow|Procces flow]] | *[[/TIO_ALU_Gratings_Procces_flow|<strong>Procces flow</strong>]] | ||
===Experimental Demonstration of Effective Medium Approximation Breakdown in Deeply Subwavelength All-Dielectric Multilayers=== | ===Experimental Demonstration of Effective Medium Approximation Breakdown in Deeply Subwavelength All-Dielectric Multilayers=== | ||
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All-Dielectric Multilayers. Physical Review Letters, 115(17), 177402 [http://journals.aps.org/prl/abstract/10.1103/PhysRevLett.115.177402 LINK] | All-Dielectric Multilayers. Physical Review Letters, 115(17), 177402 [http://journals.aps.org/prl/abstract/10.1103/PhysRevLett.115.177402 LINK] | ||
*[[/EMT_Procces_flow|Procces flow]] | *[[/EMT_Procces_flow|<strong>Procces flow</strong>]] | ||
==Publications in proceedings== | ==Publications in proceedings== | ||