LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions
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*[[/TiO2_Q_plates|Procces flow]] | *[[/TiO2_Q_plates|Procces flow]] | ||
===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition=== | ===Fabrication of High Aspect Ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> Nanogratings by Atomic Layer Deposition=== | ||