LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions
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Shkondin, E., Takayama, O., Lindhard, J., Larsen, P., Mar, M., Jensen, F. & Lavrinenko, A. | Shkondin, E., Takayama, O., Lindhard, J., Larsen, P., Mar, M., Jensen, F. & Lavrinenko, A. | ||
(2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016) [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK] | (2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016) [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK] | ||
*[[/TIO_ALU_Gratings_Procces_flow|Procces flow]] | *[[/TIO_ALU_Gratings_Procces_flow|Procces flow]] | ||