Jump to content

LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions

← Older editNewer edit →
VisualWikitext
Eves (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,346 edits
Eves (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,346 edits
Line 26: Line 26:


===Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition===
===Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition===
Reference and link to the publication
Shkondin, Takayama, O., Lindhard, J., Larsen, P., Mar, M.,Jensen F. & Lavrinenko, A.
(2016). Fabrication of high aspect ratio TiO<sub>2</sub> and Al<sub>2</sub>O<sub>3</sub> nanogratings by atomic layer deposition. Journal of Vacuum Science and Technology A, 34, 031605 (2016)  [http://scitation.aip.org/content/avs/journal/jvsta/34/3/10.1116/1.4947586 LINK]
 


*Link Process flow(s) relevant to this publication
*Link Process flow(s) relevant to this publication
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=LabAdviser/Technology_Research/Fabrication_of_Hyperbolic_Metamaterials_using_Atomic_Layer_Deposition"