LabAdviser/Technology Research/Fabrication of Hyperbolic Metamaterials using Atomic Layer Deposition: Difference between revisions
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From the fabrication standpoint, HMMs turn out to be deceptively simple: a typical geometry consists of a repeated basic metal-dielectric bilayer stack or a lattice of metallic nanowires embedded in a dielecric matrix. However, for the salient HMM properties to be pronounced, ultrathin, nanometer-scale thicknesses are required. | From the fabrication standpoint, HMMs turn out to be deceptively simple: a typical geometry consists of a repeated basic metal-dielectric bilayer stack or a lattice of metallic nanowires embedded in a dielecric matrix. However, for the salient HMM properties to be pronounced, ultrathin, nanometer-scale thicknesses are required. | ||
The required high-quality ultrathin layers (around 10 nm) can be fabricated using atomic layer deposition (ALD). ALD is a cyclic self-limiting thin film deposition technology allowing molecule level thickness control. As the deposition relies on a surface reaction, conformal pinhole free films can be deposited. | The required high-quality ultrathin layers (around 10 nm) can be fabricated using atomic layer deposition (ALD). ALD is a cyclic self-limiting thin film deposition technology allowing molecule level thickness control. As the deposition relies on a surface reaction, conformal pinhole free films can be deposited. | ||
The main challenge of implementation of ALD processing for HMM fabrication is the requirement for depositing alternating layers of metals (Ag, Cu, W) and dielectric spacers (alumina, titania, silica) . Required thicknesses are in the range 5-15 nm for metals and 10-20 nm for dielectrics (oxides).<br> | The main challenge of implementation of ALD processing for HMM fabrication is the requirement for depositing alternating layers of metals (Ag, Cu, W) and dielectric spacers (alumina, titania, silica) . Required thicknesses are in the range 5-15 nm for metals and 10-20 nm for dielectrics (oxides).<br clear="all" /> | ||
==Publications== | ==Publications== | ||