Specific Process Knowledge/Lithography: Difference between revisions
Appearance
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*[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Laurell)|KS Spinner]] | *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Laurell)|KS Spinner]] | ||
*[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Polymers)|Manual Spinner (Polymers)]] | *[[Specific Process Knowledge/Lithography/Coaters#Manual Spinner (Polymers)|Manual Spinner (Polymers)]] | ||
===[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]=== | ===[[Specific Process Knowledge/Lithography/UVExposure|UV Exposure]]=== | ||
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===[[Specific Process Knowledge/Lithography/Development|Development]]=== | ===[[Specific Process Knowledge/Lithography/Development|Development]]=== | ||
===[[Specific Process Knowledge/Lithography/ | |||
===[[Specific Process Knowledge/Lithography/Strip|Strip]]=== | |||
*[[Specific Process Knowledge/Lithography/Strip#PlasmaAsher1|Plasma Asher 1]] | |||
*[[Specific Process Knowledge/Lithography/Strip#PlasmaAsher2|Plasma Asher 2]] | |||
*[[Specific Process Knowledge/Lithography/Strip#III-VPlasmaAsher|III-V Plasma Asher]] | |||
*[[Specific Process Knowledge/Lithography/Strip#RoughAcetoneSTrip|Rough Acetone Strip]] | |||
*[[Specific Process Knowledge/Lithography/Strip#FineAcetoneSTrip|Fine Acetone Strip]] | |||
===[[Specific Process Knowledge/Lithography/LiftOff|Lift-off]]=== | |||
*[[Specific Process Knowledge/Lithography/LiftOff#LiftOffWetBench|Lift-off Wet Bench]] | |||
*[[Specific Process Knowledge/Lithography/LiftOff#LiftOff(4",6")|Lift-off (4", 6")]] | |||
===[[Specific Process Knowledge/Lithography/WaferCleaning|Wafer Cleaning]]=== | ===[[Specific Process Knowledge/Lithography/WaferCleaning|Wafer Cleaning]]=== | ||
===[[Specific Process Knowledge/Lithography/Characterization|Characterization]]=== | ===[[Specific Process Knowledge/Lithography/Characterization|Characterization]]=== | ||
===[[Specific Process Knowledge/Lithography/DirectLaserWriter|Direct Laser Writer]]=== | ===[[Specific Process Knowledge/Lithography/DirectLaserWriter|Direct Laser Writer]]=== | ||