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Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

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=== Shallolr ===
=== Shallolr ===


The shallolr recipe is designed to etch (with sizes 1 <math>\mu</math>m-) structures in silicon  
The shallolr recipe is designed to etch features (with sizes above 1 <math>\mu</math>m) in silicon down to a depth that ranges from a few microns to some 50 microns.


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