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Specific Process Knowledge/Etch/ASE (Advanced Silicon Etch): Difference between revisions

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=== Shallolr ===
=== Shallolr ===


The shallolr recipe is designed to etch (1 <math>\mu m - \infty </math>) structures in silicon down
The shallolr recipe is designed to etch (with sizes 1 <math>\mu</math>m-) structures in silicon  


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