Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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SSE Spinner, Maximus 804, SSE Sister Semiconductor Equipment is a resist spinning system at Danchip which can be used for spinning on 2", 4" and 6" substrates. | SSE Spinner, Maximus 804, SSE Sister Semiconductor Equipment is a resist spinning system at Danchip which can be used for spinning on 2", 4" and 6" substrates. | ||
The system is equipped with 2 different resists lines: AZ5214E and AZ4562 and 2 syringe lines, which can be used for spinning of e-beam resist. | The system is equipped with 2 different resists lines: | ||
*AZ5214E and | |||
*AZ4562 and | |||
*2 syringe lines, which can be used for spinning of e-beam resist. | |||
The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager: Equipment info in LabManager | The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager: Equipment info in LabManager | ||