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Specific Process Knowledge/Lithography/Coaters: Difference between revisions

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[[Image:SSEspinner2.jpg|200 × 200px|thumb|The SSE spinner MAXIMUS: positioned in Cleanroom 13.]]
[[Image:SSEspinner2.jpg|200 × 200px|thumb|The SSE spinner MAXIMUS: positioned in Cleanroom 13.]]


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The SSE spinner MAXIMUS: positioned in Cleanroom 13.
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SSE Spinner, Maximus 804, SSE Sister Semiconductor Equipment is a resist spinning system at Danchip which can be used for spinning on 2", 4" and 6" substrates. The system is equipped with 2 different resists lines: AZ5214E and AZ4562 and 2 syringe lines, which can be used for spinning of e-beam resist.  
The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager: Equipment info in LabManager


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==KS Spinner==
==KS Spinner==