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| ==KS Spinner== | | ==KS Spinner== |
| [[Image:KSspinner.JPG|200×200px|right|thumb|The KS spinner is placed in Cleanroom 3.]] | | [[Image:KSspinner.JPG|200×200px|right|thumb|The KS spinner is placed in Cleanroom 3.]] |
| At Danchip we have RC8-THP system which is one of the SUSS MicroTech spinners.
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| The main purpose of this equipment is experimental spinning the different resist.The spinner has one resist line, AZ5214E, for automatic dispense. All other resist dispenses manually from syringe or disposable pipettes. All SU8 spinning are done on this machine.
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| The machine can be also used for spinning on the "difficult" surfaces like the substrates with holes, backside structures and unusual shapes.
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| '''The user manual(s), quality control procedure(s) and results and contact information can be found in LabManager:'''
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| Equipment info in [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=43 LabManager]
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| == Process information == | | == Process information == |
