Specific Process Knowledge/Etch/Wet Silicon Nitride Etch: Difference between revisions
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!Substrate size | !Substrate size | ||
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4" wafers | |||
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*<nowiki>#</nowiki>1 50mm wafer | *<nowiki>#</nowiki>1 50mm wafer | ||
*<nowiki>#</nowiki>1 100mm wafer | *<nowiki>#</nowiki>1 100mm wafer | ||
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!'''Allowed materials''' | !'''Allowed materials''' | ||
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*Silicon | |||
*Silicon oxides | |||
*Silicon nitrides | |||
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*Silicon | *Silicon | ||
*Silicon oxides | *Silicon oxides | ||
*Silicon nitrides | *Silicon nitrides | ||
|- | |- | ||
|} | |} | ||