Jump to content

Specific Process Knowledge/Etch/DRIE-Pegasus/processA: Difference between revisions

← Older editNewer edit →
VisualWikitext
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
Jmli (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
4,580 edits
Line 102: Line 102:
== Process A guidelines ==
== Process A guidelines ==


The section below describes an experiment where the performance of Process A is explored as a function of trench width and local/global etch load.
Process A is optimized for speed and depending on feature size and etch load it will
 


== Process A performance ==
== Process A performance ==
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Etch/DRIE-Pegasus/processA"