Revision as of 14:00, 8 May 2013

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Name of equipment

Write a short description of the equipment(s).

The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:

LabManager

Process information

Link to process pages - e.g. one page for each material

Example:

Electroplating of nickel

Equipment performance and process related parameters

Equipment		Equipment 1
Purpose		Purpose 1 Purpose 2
Performance	Response 1	Performance range 1 Performance range 2
Performance	Response 2	Performance range
Process parameter range	Parameter 1	Range
Process parameter range	Parameter 2	Range
Substrates	Batch size	# 50 mm wafer # 100 mm wafer # 150 mm wafer
	Allowed materials	Allowed material 1 Allowed material 2

@@ Line 60: / Line 60: @@
 |style="background:LightGrey; color:black"|Batch size
 |style="background:WhiteSmoke; color:black"|
-*<nowiki>#</nowiki> small samples
+*<nowiki>#</nowiki> 50 mm wafer
-*<nowiki>#</nowiki> 50 mm wafers
+*<nowiki>#</nowiki> 100 mm wafer
-*<nowiki>#</nowiki> 100 mm wafers
+*<nowiki>#</nowiki> 150 mm wafer
-*<nowiki>#</nowiki> 150 mm wafers
 |-
 | style="background:LightGrey; color:black"|Allowed materials