Revision as of 12:56, 8 May 2013

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Name of equipment

Write a short description of the equipment(s).

The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:

LabManager

Process information

Link to process pages - e.g. one page for each material

Example:

Electroplating of nickel

Equipment performance and process related parameters

Equipment		Equipment 1
Purpose		Purpose 1 Purpose 2
Performance	Response 1	Performance range 1 Performance range 2
Performance	Response 2	Performance range
Process parameter range	Parameter 1	Range
Process parameter range	Parameter 2	Range
Substrates	Batch size	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers
	Allowed materials	Allowed material 1 Allowed material 2

@@ Line 50: / Line 50: @@
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range
 |style="background:LightGrey; color:black"|Parameter 1
-|style="background:WhiteSmoke; color:black"|
-*Range
 |style="background:WhiteSmoke; color:black"|
 *Range
 |-
 |style="background:LightGrey; color:black"|Parameter 2
-|style="background:WhiteSmoke; color:black"|
-*Range
 |style="background:WhiteSmoke; color:black"|
 *Range
@@ Line 68: / Line 64: @@
 *<nowiki>#</nowiki> 100 mm wafers
 *<nowiki>#</nowiki> 150 mm wafers
-|style="background:WhiteSmoke; color:black"|
-*<nowiki>#</nowiki> small samples
-*<nowiki>#</nowiki> 50 mm wafers
-*<nowiki>#</nowiki> 100 mm wafers
-*<nowiki>#</nowiki> 150 mm wafers
 |-
 | style="background:LightGrey; color:black"|Allowed materials
@@ Line 78: / Line 69: @@
 *Allowed material 1
 *Allowed material 2
-|style="background:WhiteSmoke; color:black"|
-*Allowed material 1
-*Allowed material 2
-*Allowed material 3
 |-
 |}
 <br clear="all" />