Revision as of 13:38, 7 May 2013

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Name of equipment

Write a short description of the equipment(s).

The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:

LabManager

Process information

Link to process pages - e.g. one page for each material

Example:

Equipment performance and process related parameters

Equipment		Equipment 1
Purpose		Purpose 1 Purpose 2
Performance	Response 1	Performance range 1 Performance range 2
Performance	Response 2	Performance range
Process parameter range	Parameter 1	Range	Range
Process parameter range	Parameter 2	Range	Range
Substrates	Batch size	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers	# small samples # 50 mm wafers # 100 mm wafers # 150 mm wafers
	Allowed materials	Allowed material 1 Allowed material 2	Allowed material 1 Allowed material 2 Allowed material 3

@@ Line 32: / Line 32: @@
 !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment
 |style="background:WhiteSmoke; color:black"|<b>Equipment 1</b>
-|style="background:WhiteSmoke; color:black"|<b>Equipment 2</b>
 |-
 !style="background:silver; color:black;" align="center" width="60"|Purpose
@@ Line 39: / Line 38: @@
 *Purpose 1
 *Purpose 2
-|style="background:WhiteSmoke; color:black"|
-*Purpose 1
-*Purpose 2
-*Purpose 3
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance
@@ Line 49: / Line 44: @@
 *Performance range 1
 *Performance range 2
-|style="background:WhiteSmoke; color:black"|
-*Performance range 1
-*Performance range 2
-*Performance range 3
 |-
 |style="background:LightGrey; color:black"|Response 2
 |style="background:WhiteSmoke; color:black"|
 *Performance range
-|style="background:WhiteSmoke; color:black"|
-*Performance range
 |-
 !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range