Specific Process Knowledge/Thin film deposition/Electroplating-Ni: Difference between revisions
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!colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | !colspan="2" border="none" style="background:silver; color:black;" align="center"|Equipment | ||
|style="background:WhiteSmoke; color:black"|<b>Equipment 1</b> | |style="background:WhiteSmoke; color:black"|<b>Equipment 1</b> | ||
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!style="background:silver; color:black;" align="center" width="60"|Purpose | !style="background:silver; color:black;" align="center" width="60"|Purpose | ||
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*Purpose 1 | *Purpose 1 | ||
*Purpose 2 | *Purpose 2 | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Performance | ||
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*Performance range 1 | *Performance range 1 | ||
*Performance range 2 | *Performance range 2 | ||
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|style="background:LightGrey; color:black"|Response 2 | |style="background:LightGrey; color:black"|Response 2 | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
*Performance range | *Performance range | ||
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!style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | !style="background:silver; color:black" align="center" valign="center" rowspan="2"|Process parameter range | ||