Specific Process Knowledge/Back-end processing/Polishing machine: Difference between revisions
No edit summary |
No edit summary |
||
| Line 12: | Line 12: | ||
<!-- give the link to the equipment info page in LabManager: --> | <!-- give the link to the equipment info page in LabManager: --> | ||
[http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach= | [http://labmanager.danchip.dtu.dk/function.php?module=Machine&view=view&mach=299 The Logitech PM5 Polisher/Lapper in LabManager] | ||
<br clear="all" /> | <br clear="all" /> | ||
Revision as of 07:29, 7 May 2013
Feedback to this page: click here
Polisher/Lapper
The Logitech PM5 Polisher/Lapper is for thinning down wafers and other substrates.
The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:
The Logitech PM5 Polisher/Lapper in LabManager