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Specific Process Knowledge/Etch/ICP Metal Etcher/Chromium: Difference between revisions

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Bureaucrats, danchip, Administrators
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! Parameter
! Parameter
|'''Cr etch'''
|'''Cr etch''' by bghe@danchip
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! Cl<sub>2</sub> (sccm)
! Cl<sub>2</sub> (sccm)
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