Specific Process Knowledge/Characterization/Sample imaging: Difference between revisions
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Optical profiler... | Optical profiler... | ||
The main purpose of the optical profiler is 3D imaging of sample surfaces, step height measurements, roughness measurement. | The main purpose of the optical profiler is 3D imaging of sample surfaces, step height measurements, roughness measurement. | ||
The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | The optical profiler provides standard microscope imaging, confocal imaging, confocal profiling, PSI (Phase Shift Interferometry), VSI (Vertical Scanning Interferometry) and high resolution thin film thickness measurement on a single instrument. The main purpose is 3D topographic imaging of surfaces, step height measurements in smaller trenches/holes than can be obtained with standard stylus method, roughness measurements with larger FOV than the AFM, but less horisontal resolution. | ||
SEM... | SEM... | ||
AFM... | AFM... | ||
The AFM is used to study samples with nanoscale structures | The AFM is used to study samples with nanoscale structures. The field of view and is very limited, and the scan speed is slow, so it only possible to get information a small part of the sample at a time. The resolution is limited by the tip (width ~ 5 um, angle ~ 45 degrees for the standard tips), but it is possible to buy special tips for inspection of high aspect ratio structures. Futhermore, wi | ||
Dektak... | Dektak... | ||
The Dektak is a slylus profiler | The Dektak is a slylus profiler where a stylus scans across a surface to perform very fast step height measurement. The vertical resolution is very high, but the horizontal resolution and the aspect ratio you measure are limited by tip (width ~ 5 um, angle ~ 45 degrees). Stress measurements can also be sone with the Dektak. | ||