Specific Process Knowledge/Characterization/KLA-Tencor Surfscan 6420: Difference between revisions
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[[image: | [[image:Surfscan_at_FAT.JPG|300x300px|right|thumb|The image is from the cleanroom at the place it was refurbish in California.]] | ||
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Revision as of 09:50, 23 April 2013
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KLA-Tencor Surfscan 6420
Write a short description of the equipment(s).
The user manual(s), quality control procedure(s) and results, user APV(s), technical information and contact information can be found in LabManager:
| Equipment | Equipment 1 | Equipment 2 | |
|---|---|---|---|
| Purpose |
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| |
| Performance | Response 1 |
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| Response 2 |
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| |
| Process parameter range | Parameter 1 |
|
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| Parameter 2 |
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| Substrates | Batch size |
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| Allowed materials |
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