Specific Process Knowledge/Etch/Etching of Bulk Glass: Difference between revisions

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	~~Ething~~ of Glass can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)\|AOE]] using Flourine chemistry (only fused silica) or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions and/or using Flourine chemistry.		Etching of Glass can be done either wet or dry. For wet etching please see below on this page. Dry etching can be done either with [[Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)\|AOE]] using Flourine chemistry (only fused silica) or with [[Specific Process Knowledge/Etch/IBE/IBSD Ionfab 300\|IBE]] by sputtering with Ar ions and/or using Flourine chemistry.