Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
| Line 1: | Line 1: | ||
Etch of silicon can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are: | Etch of silicon can be done by either wet etch or dry etch. The standard setups for this here at DANCHIP are: | ||
===Dry etches:=== | ===Dry etches:=== | ||
*[[/Si etch using RIE1 or RIE2|Si etch using RIE1 or RIE2]] | *[[/Si etch using RIE1 or RIE2|Si etch using RIE1 or RIE2]] | ||