Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*State-of-the-art dry silicon etcher with atmospheric cassette loader | *State-of-the-art dry silicon etcher with atmospheric cassette loader | ||
*Good selectivity to photoresist | |||
*Extremely high etch rate and advanced processing options | *Extremely high etch rate and advanced processing options | ||
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