Specific Process Knowledge/Etch/Etching of Silicon: Difference between revisions
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*High selectivity to the {111}-planes | *High selectivity to the {111}-planes | ||
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*Isotropic etch in crystalline | *Isotropic etch in crystalline silicon and polysilicon | ||
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*Can etch isotropic and anisotropic depending on the process parameters | *Can etch isotropic and anisotropic depending on the process parameters | ||